The purpose of this course is to provide basic design knowledge needed for fabrication facilities that support high-tech manufacturing and R&D. High-Tech includes, not limited to, the advanced technologies applied in the fields of micro-electronics, optoelectronics, precision equipment, telecommunication, nanotech, pharmaceutics, biotech, medical devices, animal experiment, and Aerospace. The processes undertaken in high-tech manufacturing plants and R&D labs require cleanrooms with extremely stringent environmental control.

The environmental control includes temperature and humidity requirements, air/water quality, purity of chemicals and gases, noise and vibration degree, electromagnetic and radio frequency interference, electrostatic discharge, materials out-gassing, safe grounding, assurance of personnel health, safety and security and prevention of biohazard.

The focus of this course is on designing cleanroom and engineering its associated facilities. Students will gain skills needed to meet ever-changing challenge of delivering an ultra-pure clean room and ultra-pure process utilities. Moreover, this course will strengthen students’ understanding and background in constructing high-tech manufacturing fab/plant and research lab. Many advanced topics will be introduced, such as 300mm/12" fab, 5~3 nm manufacturing, IoT (Internet of Things), Green Fab, FinFET (Fin Field-Effect Transistor), LiFi (Light Fidelity), Intelligent Sensing, AMHS (Automated Material Handling System), Waste Recycling and Circular Economy.